摘要
介绍了超高纯氩气的提纯方法。通过采用联合的单元操作,可以生产99.9999%纯度的超纯氩气,同时大大减少了贵重吸气剂的消耗。
The purification techniques for production of ultra high purity argon are investigated. By using the combined unit operation , the ultra-purity argon can be produced , at the same time , eomsumption of the expensive getter can be reduced greatly.
出处
《低温与特气》
CAS
2009年第3期1-5,共5页
Low Temperature and Specialty Gases
