摘要
主要介绍应用在半导体行业电子级特种气体输送系统质量控制的要点及其涉及到的检测仪器的工作原理,结合目前行业内气体输送系统质量控制的方法做概括性介绍。
Quality control procedures are key processes of electronic speciality gas supply system prior to turn on, testing equipment plays a very important part of this job,this paper summarized all the testing analyzers which used in ultra high purity gas system to meet quality assurance needs.
出处
《低温与特气》
CAS
2009年第3期18-19,45,共3页
Low Temperature and Specialty Gases
