2KIM Moojin,MOONWonKyu,YOONEuisung,et al. Anewcapacitive displacement sensor with highaccuracy and long-range [J]. Sensors and Actuators A : Physical,2006 (14 ) : 135 - 141.
3ANDREAS A,SIMON S P,YUSUF A,et al. High frequency bandwidth cutting force measurement inmilling using capacitance displacement sensors [J]. International Journal of Machine Tool & Manufacture,2005(45) :993 -1008.
4CHEN Yu - che,JIRI T. Effect of low-friction guideways and lead-screw flexibility high-speed machines [J]. Annals of the C1RP,1995 (1) :353 -356.