6Chien-Hung Lin,Rongshun Chen,Chien-Chang Su.Ultrasonics for Nanoimprint Lithography[C].//Proceedings of20055th IEEE Conference.Nanotechnology.2005.
7Jae-Jong Lee,Kee-Bong Choi,Gee-Hong Kim,SeungWoo Lee.The UV-Nanoimprint Lithography with Multi-head Nanoimprinting Unit for Sub-50nm Half-pitch Patterns[C].//SICE-ICASE International Joint Conference Bexco,Busan,Korea.2006.