摘要
对传统的单晶炉加热电源进行了改进和升级,将数字控制器80C196KB融入到单晶炉加热电源的控制当中,利用模拟技术、微机控制技术实现了对控温精度要求很高的直拉单晶炉温度控制系统的设计。结果表明系统的控制精度提高,能够实现对电源输出功率的实时自动调节。
Introduced a new improvement method of the traditional single crystal furnace heating power based on digital control core 80C196KB. The design of the single crystal furnace temperature control system is realized by the combination of analogical electronics and microcomputer control technology. The results show that the power supply system is able to achieve real-time self-regulation, and the control predsion is better.
出处
《核电子学与探测技术》
CAS
CSCD
北大核心
2009年第3期701-704,583,共5页
Nuclear Electronics & Detection Technology
关键词
数字化
单晶炉
电源
高精度
Digital,Single crystal furnace, Power supply, High precision