位置敏感器件在非接触测量中的应用分析

Analysis of PSD application for noncontact measurement

阐明了激光三角法的测量原理．介绍ＰＳＤ在非接触测量中的应用及其特点，并将ＰＳＤ激光三角测量与ＣＣＤ光三角测量及其它一些非接触测量方法进行了比较．

In this paper the principle of a laser triangulation technique is presented. We introduce the PSD application for a noncontact measurement and its features,compare PSD laser triangulation measurement with CCD laser triangulation measurement and other kind of noncontact measurements,and review the application of laser triangulation technique.