多种纳米结构SiO_2的制备及其生长机制研究

Preparation of SiO_2 nanostructures and their growth mechanism

采用化学气相沉积方法,以Au量子点作催化剂在Si衬底上直接生长特定形貌的SiO2纳米结构.与传统的VLS机制相比,SiO2纳米结构的生长应该是SLS生长机制.

Various morphologies of SiO2 nanostructures were fabricated on a Si substrate using Au quantum dots as catalyst by chemical vapor deposition method. Compare with the conventional VLS mechanism, it was found that growth of SiO2 nanostructures was a SLS mechanism.