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基于AFM的机器人化纳米操作系统综述 被引量:8

Review of AFM Based Robotic Nanomanipulation
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摘要 对基于扫描隧道显微镜(Scanning tunnel microscope,STM)及原子力显微镜(Atomicforcemicroscope,AFM)的纳米操作技术发展进行阐述,针对其中存在的主要问题,引述出机器人化纳米操作的必要性。接着,对国内外机器人化纳米操作系统的研究进展、现状及存在的主要问题进行详细分析,提出基于AFM的机器人化纳米操作系统的结构原型,并指出实现机器人化纳米操作所需解决的关键技术问题及相应的解决方案之一,为进行深入的机器人化纳米操作研究提供了可以借鉴的研究方向。 The development of nanomanipulation based on scanning tunnel microscopr and atomic force microscope (AFM) is introduced, and the necessity of robotic nanomanipulation is presented for solving the problems in the nanomanipulation. Then the research development, state and main existing problems of robotic nanomanipulation are analyzed, according to which the structure prototype of AFM based nanomanipulation system is presented, and key technical problems for realizing robotized nanomanpulation is put forward, which provide valuable ideas for further research work on robotic nanomanipulation.
出处 《机械工程学报》 EI CAS CSCD 北大核心 2009年第6期14-23,共10页 Journal of Mechanical Engineering
基金 国家自然科学基金重点资助项目(60635040)
关键词 纳米操作 原子力显微镜 机器人化 探针定位 信息反馈 Nanomanipulation Atomic force microscope Robotization Probe positioning Information feedback
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