三测头法误差分离技术的理论与试验

Theory and Experiment of Three-probe Error Separation Technique

建立回转体零件频域三测头法误差分离数学模型,采用离散傅里叶变换法对误差分离基本方程进行求解,并通过计算机仿真对该数学模型进行验证和分析;采用经TALYROND262形状测量仪标定过的试件,在MB1332A半自动外圆磨床上进行圆度、圆柱度和轴线直线度误差在位测量对比试验,仿真结果和试验均成功地证明理论和数学模型的正确性,并得出结论:频域三测头误差分离方法基本上能实现各项误差的完全分离,适于在位测量,并可获得较高的在位测量精度。

The mathematical model of the error separation technique （EST） of the rotary workpiece based on the three-probes cylindrical method is established, and the method to solve the model is given. The computer simulation on the three-probe EST is also carded out. Several contrastive experiments of the on-line measurement are carded out on a semi-automatic grinding machine （MB1332A）. The workpieces used in the experiments are measured by TALYROND 262 geometrical error measurement instrument. The results of these experiments successfully verify that the theory and mathematical models are correct. The contrast of the measuring results in these experiments proves that the three-probe method can realize the complete separation of all kinds of errors basically and this method is applicable to on-line measurement ofworkpieces and high online measurement accuracy can be obtained.