基于FIB技术的微纳单元的研制

Development of the Micro-Nano Unit Using FIB Techniques

利用碳纳米管表面气相生长技术和聚焦离子束(FIB)加工等微纳加工技术,开展了微纳单元的工艺方法研究,探索了基于碳纳米管的微纳结构单元的实验制备工艺。结构表征和电学特性测试结果表明,这种制备工艺可以加工出具有欧姆接触或肖特基接触的微纳单元,为基于碳纳米管的微纳单元的制作提供了一定的思路。

Based on the growing technology of carbon nanotube and focused ion beam techniques（FIB）, the experiments of micro nano unit based on carbon nanotube were finished and the fabrication processes of micro nano unit were developed. The results show that the micro nano unit with Ohmic contact or Skotoky contact can be fabricated by this process, which can provide some idea for the fabrication of micro nano unit based on carbon nanotube.