摘要
介绍了MBE中坩埚的结构、坩埚材料的性质、加热原理.根据MBE的使用经验和工作特点,重点分析了可能引起坩埚损坏的原因,为使用MBE以及同类实验设备提供技术指导和参考经验.
In this paper, the structure features of crucible, properties of crucible material , heating principle are introduced. Based on the operation experience and operating features, some causes for damaging crucible are analyzed. The technical guide and valuable experiences are provided in operating MBE and similar experimental setups.
出处
《凯里学院学报》
2009年第3期12-14,共3页
Journal of Kaili University
关键词
MBE
坩埚
加热原理
损坏原因分析
molecular beam epitaxy
crucible
heating principle
damage cause analysis
