基于He-Ne双频激光干涉的大尺寸精密检测技术

Precision Measuring Technology for Large Dimensions Based on Two-Frequency He-Ne Interferometry

介绍一种以双纵模热稳频He-Ne激光为光源进行大尺寸精密测量的新技术。该技术在双频激光干涉技术的基础上,解决了一般测长技术在测量大尺寸零件时,必须要有一个与被测尺寸相当的长导轨,从而无法进行现场测量的难题。利用该技术所研制的装置,可对大尺寸零件进行无导轨现场精密测量,同时还保留了一般双频激光干涉仪的所有功能。

This paper introduces a novel precision measuring technology for large dimensions using two longitudinal modes He-Ne laser with thermal frequency stabilization as hght source. Based on the two-frequency laser interferometry, it resolves the difficulty that field measurement is nearly impossible when using general measuring technologies for large size parts, since a long guide correspond to the measured length must be used. The measuring equipment applying this technology can be used to the field precision measurement without guide for large size parts, meanwhile all the functions of the general two- frequency laser interferometer are remained.