新型工艺制备Fe/Cr/Si复合薄膜的结构研究

Characterization of Fe/Cr/Si composite films prepared by a novel method

采用改进的水热法和新型工艺在SUS304不锈钢表面制备了Fe/Cr掺杂SiO2薄膜,并通过扫描电镜(SEM)、X射线衍射(XRD)、电子探针(EPMA)和X射线光电子能谱深度分析(XPS)等检测手段对薄膜结构进行了分析。结果表明膜层主要分为两层:表层为共溶氧化物层;底层为Cr、Fe的氧化物,主要为尖晶石结构和Si网状结构。通过XPS检测结果得知,Si元素的加入不是简单的物理混合,而是与金属元素生成了Si—Fe键,进一步提高了膜层的结合力和耐酸性。

In this paper,a Fe/Cr/Si thin films which can improve the anti-corrosion character of materials were prepared on SUS3O4 stainless steels substrates by modified hydrothermal method and a novel process. The Fe/ Cr/Si thin film was characterized by scanning electronic micrographs （SEM）,X-ray diffraction （XRD）,electron probe X-ray micro analyzer （EPMA） and X-ray photoelectron spectroscopy （XPS）. It proves that the film consists of two layers, surface layer consists of metal oxide and the suhstrate layer compose mainly spinel of Fe （FexCry）O4 companied with silicon net work. In which the addition of Si element came into being Si-Fe with Fe3＋ rather than showed SiO2 only,this integration can improve effectively the corrosion resistance of stainless steels.