摘要
TiO2材料作为氧传感器具有广泛的应用．本文介绍了TiO2氧传感器的工作原理和制作过程中采用的三种工艺，即陶瓷烧结体、厚膜和薄膜技术．并对如何提高氧传感器的性能进行了探讨．
TiO2 oxygen sensors are widely used. The oxygen-sensing mechanism and ceramic, thick filmand thin film techniques used for manufacturing the sensors were presented. The wads of improvingthe properties of TiO2 oxygen sensors were also discussed.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1998年第3期275-281,共7页
Journal of Inorganic Materials
关键词
二氧化钛
氧传感器
陶瓷
烧结体
titanium dioxide oxygen sensor, ceramic, thick film, thin film
