微电容式加速度计的闭环控制技术研究

The Research of Micro-capacitive Accelerometer's Control Technique

为提高微电容式加速度计的线性度和工作带宽,在设计微电容式加速度计的检测电路时,要使系统工作在闭环状态下,通过静电力反馈的方式能很好的实现闭环控制。本文主要论述了闭环控制的原理,即通过静电力反馈来实现平衡控制。并通过计算保证了闭环控制系统的稳定性。可见,闭环工作下的电容式加速度计的稳定性、精度、线性度等都得到了提高。

In order to improve the linearty and bandwidth of the micro-capacitive accelerometer, the system should in the closed loop mode. So we need to design the detection circuit to implemente it, the best way is the feedback of electrostatic force. In this paper, the fundamental of closed loop control was discussed, which is through the feedback of electrostatic force to realize the balance control. Through the analyse of closed loop system to assure the stability of system. We can see that the stability, precision and linearty of capacitance accelerometer are improved in the closed loop state.