微悬臂梁器件制作工艺的可靠性研究

Reliability for Microcantilever Device Manufacture Craft

由于传统机械加工方法不能实现微型悬臂梁阵列加工的需要,故微悬臂梁阵列的制作需要采用MEMS技术,针对MEMS中微悬臂梁制作废品率高的问题,从悬臂梁的加工工艺出发,分析了断裂、粘连、黏附等失效形式,从可靠性的角度分析失效原因,通过控制溅射铝时的温度变化有效降低层间的残余应力;通过淀积表面能厌水的覆盖层来防止黏附等相应改进措施来提高微悬臂梁器件制作的可靠性。

Because the traditional machine-finishing method cannot realize the miniature cantilever beam array processing need, therefore the micro cantilever beam array manufacture needs to use the MEMS technology,in view of MEMS in the micro cantilever beam manufacture rejection rate high question, embarked from the cantilever beam processing craft, analyzes the break, the adhesion, has adhered and so on the expiration forms, from the reliable angle analysis expiration reason, reduced the level effectively through the control sputtering aluminum time temperature change the residual stress;Tires of the water through the deposition surface energy the overburden layer to prevent adheres and so on the corresponding improvement measure to enhance the reliability which the micro cantilever beam component manufactures.