CMP综合终点检测研究

Research on Synthetic Endpoint Detection During CMP

在对电机电流终点检测、光学终点检测以及抛光垫温度检测三种终点检测技术的检测原理、特点及其装置分析讨论的基础上,对终点检测硬件电路的设计效果进行了验证。采用STRASBAUGH的Nvision软件进行移植,设置其增益、漂移量、数字过滤器的频率和类型。以W作为抛光对象,以TiN作为阻挡层,优化了工艺参数菜单设置并实施抛光,在实时形成信号曲线的基础上,由主机综合三种终点检测信号的情况,判断出精准的终点位置,为CMP抛光终点的监测和抛光垫的修整和更换提供科学的依据。

Based on the analysis of the principle, characteristics and hardware of the motor current detection, the optical endpoint detection and the pad temperature detection, the endpoint detection effectiveness of the hardware circuit design was verified. The Nvision software of the STRASBAUGH was transplanted. As the precondition of polishing, the gain, offset, frequency and type of the digital filter were set. The process parameters were optimized and the tungsten was polished with TiN as the barrier, then the real-time signal curve was achieved. Combined with the three integrated signals, the most precise endpoint position was chosen.