退火对FeZrBNb薄膜磁特性和巨磁阻抗效应的影响

The Permeability and Giant Magneto-impedance Effects of Annealed FeZrBNb Films

用射频溅射法制备了FeZrBNb软磁合金薄膜,研究了不同退火方式对薄膜磁特性和巨磁阻抗效应的影响。结果表明,退火能改善薄膜的软磁性能,使其矫顽力由0.5kA.m-1降到了0.09kA.m-1,横向和纵向有效磁导率都有所提高。退火也能明显提高薄膜样品的巨磁阻抗效应,加磁场退火的薄膜样品在13MHz下纵向和横向最大巨磁阻抗比分别为2.6%和1.7%。

The FeZrBNb soft magnetic alloy films were deposited by radio frequency sputtering on the substrate of single erystal Si. The permeability and GMI effects of samples annealed have been studied. The hysteresis loops measured by VSM show that the an- nealed films possess excellent soft magnetic properties and the coercive force is only about 0.09kA· m^-1, the longitudinal and transverse effective susceptibilities have been improved. The maximum GMI ratios were 2.6% and 1.7% in longitudinal and trans- verse fields at 13MHz by field annealing.