多晶硅铸锭涂层用高纯Si3N4微粉的研究进展与展望

Research Progress and Prospect of High Purity Si_3N_4 Powders Used as Multicrystalline Silicon Ingot Coatings

本文根据国内外高纯氮化硅微粉制备的研究情况,综述了硅粉直接氮化法、硅亚胺热分解法、气相反应法等几种氮化硅粉末的主要制备方法,介绍了各种制备方法在生产多晶硅铸锭涂层用氮化硅微粉的优缺点,并从产品质量、成本等角度分析比较了各种制备方法的特点,指出了制备多晶硅铸锭用氮化硅粉末的主要发展方向。

Based on the recent research of Si3N4 powders synthesis methods all over the world, some primary methods were comprehensively reviewed, such as the direct nitridation, ammonolysis of Si （NH） 2, vapor deposition. The advantages and disadvantages of each method of making Si3N4 powders for multicrystalline ingot coating were compared, and the characterization of different methods were analyzed in terns of products quality, cost and so on. The main direction for the fabrication and development of Si3N4 fine powder was also developed.