微波ECR等离子体材料加工技术研究

INVESTIGATION OF MATERIALS PROCESSED WITH THE MICROWAVE ECR PLASMA

微波电子回旋共振（ＥＣＲ）等离子体技术近年来在薄膜沉积、材料改性和有机高分子材料聚合等材料加工领域获得了广泛的应用与快速发展，本文结合近期的主要研究结果对此作一介绍。

お? Recently,microwave electron cyclotron resonance(ECR) plasma has been used in depositing films, processing materials and synthesizing organic polymer. In this paper, some new applications and developing are introduced, including our some new experimental results.