一种位相板衍射图样的图像处理新方法

New image processing method for phase plate diffraction image

本文介绍了在半导体激光光纤和位相板相结合的准直情况下，利用ＣＣＤ探测器测量大尺寸形位误差的原理，并针对位相板衍射图像的特点，提出了一种处理此类衍射图样的图像处理新方法——投影法。同在时间上采用的多次平均的方法相比较，投影法相当于采用了空间上的平均，消除了ＣＣＤ表面保护玻璃形成的干涉条纹的影响，对空气扰动也起到了很好的抑制作用。并且使二维图像处理变为一维计算。

This paper describes the measuring principle of large scale form and position errors using CCD detector, laser diode fiber and phase plate alignment technique. According to the characters of phase plate diffraction image, a new image processing method—projecting method is proposed. Compared with the mean method in time, the projecting method uses the mean method in space. So, the method can eliminate the effect of interference fringe introduced by the window glass of a CCD and also the air turbulence are averaged. Because the projecting can make a twodimension image changed into two onedimension images, so the data processing is very fast.