摘要
本文介绍了西门子S7-400 PLC和WinCC上位机系统在某硅片清洗设备中的应用,对其使用特点及网络结构进行了详尽的描述。
This paper introduces the application of Siemens S7-400 PLC and WinCC control software in the wafers cleaning machine, and it make a particular description for the characteristic of the use and the structure of the network.
