国内二手半导体设备的翻新调试及情况分析

The domestic refurbishment debugging and status analyses of used semiconductor equipments

介绍了国内二手半导体设备的市场应用、特点,并着重就国内二手设备的翻新调试和使用等方面的问题做了介绍分析并给出了一点建议,对行业有一定的指导作用。

The market applications and characteristics of domestic used semiconductor equipments are introduced＆ analyses in this paper. Some issues of refurbishment debugging and use of domestic used semiconductor equipments are especially introduced and some suggestions are offered. The introduction and suggestions have some guiding functions to the industry.