超薄形晶体零件加工新工艺

New technology of processing extrathin crystal elements

本文介绍了厚度为０．０５ｍｍ的偏硼酸钡（ＢＢＯ）超薄形晶体零件的加工新工艺，解决了零件在加工中易碎裂、变形及平行度难以控制等各种难题。应用这种新工艺加工了近２０片超薄形晶体，应用该晶体零件获得了超短脉宽激光的要求。

In this paper, a new technology for processing extrathin (0.05mm thickness)BBO crystal elements was introduced. The problems arised from processing, such as fragility, deformation and the parallelising which is difficult to be controlled, were solved. Using this technology, we have successfully process about 20 pieces of extrathin crystal elements, which meet the user′s requirement of attaining ultrashort pulse laser with this crystal element.