摘要
提出一种测量微小孔的方法，该系统由半导体激光器、步进电机驱动的二维工作台和以微型计算机为基础的控制电路组成。
A method measuring microhole diameter is presented in this paper.To perform measurement,a measuring system is developed,which consists of laser sensor head,2Dtable,driven by step motors,driven and control circuits based on single chip microcomputer.
出处
《机械与电子》
1998年第3期8-20,共13页
Machinery & Electronics
关键词
微小孔
激光传感头
激光测量
Microhole Laser sensor head Laser measuring
