有机薄膜衬底 ITO 透明导电膜的制备及光电特性的研究

PERFORMANCE STUDY OF OPTOELECTRICAL PROPERTIES OF ITO FILMS DEPOSITED ONTO POLYESTER SUBSTRATES BY EVAPRATING METHOD

采用真空反应蒸发技术，在有机薄膜基片上制备出高质量的ＩＴＯ透明导电薄膜，对薄膜的结构和光电特性进行了研究。制备的最佳薄膜在可见光范围的平均透过率达８４％，电阻率为８．２３×１０－４Ωｃｍ，载流子浓度为１．７２×１０２０ｃｍ－３。

ITO films were prepared by evaporating In Sn alloys onto the polyester substrates in oxygen.Structure and optoelectrical properties of the deposited films were investigated.ITO films with low electrical resistivity(-8.23×10 -4 Ωcm),high visible transmission(>83%),and high carrier density(-1.72×10 20 cm -3 )can be obtained by suitable controlling the deposition parameters.