摘要
用干涉法研究了热蒸发（ＰＶＤ）方法制备的ＣｄＴｅ薄膜材料的红外光学特性．通过对不同基板温度和不同薄膜厚度ＣｄＴｅ薄膜样品的研究，确定了在薄膜沉积过程中基板温度和膜厚对ＣｄＴｅ薄膜红外光学特性的影响．发现ＣｄＴｅ薄膜具有一定的非均匀性，其折射率随着薄膜厚度的增加而减小．在１２０～２００℃范围内，基板温度对ＣｄＴｅ薄膜红外光学特性的影响不大．
Infrared optical properties of CdTe coatings deposited by PVD method were investigated by interference method. With the study of CdTe coatings deposited at different substrate temperture and of different thickness, it was found that CdTe coatings are inhomogeneous, and the refractive index of CdTe coatings varies with the thickness of layer. It was also found that the substrate temperature between 120℃ and 200℃ almost has no effect on optical properties of CdTe coatings.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
1998年第3期192-196,共5页
Journal of Infrared and Millimeter Waves
基金
国防科技预研基金
关键词
折射率
基板温度
红外光学特性
碲化镉
薄膜
refractive index, thickness, substrate temperature, inhomogeneity.
