摘要
本文介绍了影响半导体异质外延晶片质量的主要因素，检测方法，几个典型测试结果。最后给出了几个外延晶片材料质量评估的参照标准。
The main factors affecting the quality of semiconductor heterostructure epitaxy chips, inspection methods and some typical test results have beeen introduced in this pater. Finally, some reference criteria for the quality inspection of epitaxy chip materials are given.
出处
《光通信研究》
北大核心
1998年第3期57-62,共6页
Study on Optical Communications
关键词
异质结构材料
光荧光谱
半导体外延晶片
heterostructure material, dislocation and defect, Xray double crystal diffraction, photoluminescence spectrum
