引信MEMS静电探测器阵列设计(英文)

Design of fuze MEMS electrostatic detection array

引信可以利用空中目标运动产生的静电场信息对目标进行探测,而MEMS的特殊性能非常适合于引信静电探测器的设计。在引信有限的体积内布设MEMS静电探测阵列,通过对目标静电场信息进行检测,可以获得目标的位置和速度信息。本文运用表面加工工艺设计了一种MEMS薄膜电极的垂直振动式电场传感器阵列。介绍了该电场传感器探测单元及阵列的结构、组成及工作原理,说明了该器件的加工工艺。通过MEMS静电探测单元的空间布阵,研究了引信MEMS静电探测阵列对目标定位的原理,推导了目标定位的公式,使用MEMS静电探测阵列探测了目标的静电场,实现了对目标位置的定位。

The motion of a target in air will produce electrostatic fields which can be detected by a fuze to provide some useful information of the target. Moreover, MEMS devices have shown their characteristics of small sizes, low power consumption and high integration to be suitable for design of MEMS electrostatic detection arrays. When a MEMS electrostatic detection array is placed in the limited space of a fuze,the array can acquire the information of position and velocity of the target by detecting electric field around it. A MEMS electrostatic field detection array with a vibrating film is designed using surface machining processes in this paper. The princile and fabrication of the electric field detection array are systematically presented and the processing techniques of a electrostatic field sensor are explained particularly. The principle and formula of target locating are also studied . The results show that the electrostatic field of the target can be detected by using three MEMS electrostatic detectors,and the positions of the point target along the axis of the projectile and vertical to the axis of the projectile can be obtained. It is concluded that the MEMS electrostatic detection array can locate exactly the target.