扇形梳齿驱动式体硅微机械隧道陀螺仪的设计与制备(英文)

Design and fabrication of bulk micromachined tunneling gyroscope with fan-shaped comb drivers

介绍了一种利用隧道效应所具有的高位移敏感特性来获得较高灵敏度的微机械隧道振动陀螺仪的设计和工艺制备,该陀螺仪分别采用扇形梳齿驱动和面外振动悬臂梁的方式实现质量块的振动和恒隧道电流的检测。介绍了扇形梳齿驱动的工作原理和隧道陀螺仪的设计。由于采用了硅玻键合和深反应离子蚀刻(DRIE)的DDSOG体硅制备工艺,因而可获得较大的敏感质量块,从而使陀螺仪具有较高的灵敏度和较大的动态响应范围。根据检测模态和驱动模态匹配的原则,利用有限元模型对隧道陀螺仪的结构尺寸进行了优化,仿真结果表明,该陀螺仪在常压下的灵敏度为0 .007nm(°)/s。

A bulk micromachined vibratory tunneling gyroscope which employs the high displacement sensitivity of quantum tunneling to obtain the desired resolution has been developed. The device consists of fan-shaped comb drivers which can oscillate and an out-of-plane silicon cantilever linked up to a substrate suspended by springs. Because of adopting a solid mass silicon structure to get the larger proof mass, the new uhracompact device can provide extremely high sensitivity and a wide dynamic range. Based on the modal analysis by a Finite Element Method（FEM）, the structure dimensions are optimized according to resonant frequency matching of the driving mode and the sensing mode. Simu lation results demonstrate that the gyroscope owns the sensitivity of 0. 007 nm（°）/s at atmospheric pressure, which also shows the Deep Dry Silicon on Glass （DDSOG） process can be used to fabricate not only the micro-machined tunneling gyroscope but also other sensors and actuators.