微细加工技术在国内外发展趋势的研究

The Developing Trend of Micro-processing Technology at Home and Aboard

研究了国内外微细加工技术的发展状况,基于MEMS器件的微细加工技术,提出了在低电位、微电流密度下电化学钝化效应基础上,用高频振动效应消除钝化,用与高频振动同频同步的窄脉冲电流电解作用去除机体材料,实现电解复合微细加工,这是微细加工技术的新构想及发展趋势。

In research of the developing trend of Micro-processing technology and basing on the micro- processing technology of MEMS, we suggest that under the low potential and the effect on passivity of electrochemical after Micro-current density, we can use the high-frequency vibration effect to release the passivity and use the narrow pulse current role of electrolytic as well as the high frequency vibration for removing body material. This can accomplish the micro- processing of compound electrolysis which is also a new concept and developing trend of micro-processing technology.