超精密运动平台高动态性能运动部件的研究

Research of the High Dynamic Performance Moving Parts On Ultra-precision Stage

随着对超精密运动平台运动速度加速度和定位精度的不断提高,运动系统的动态性能的要求也越来越高,这不仅对控制系统提出了更高的要求,同时对其中运动部件的模态要求也提高了。针对此类平台的要求,开展通过陶瓷提高运动部件动态性能的研究。首先通过简化模型分析了陶瓷与铝合金部件的模态差异,认识到陶瓷可以大幅度提升运动部件的模态。然后通过理论模态分析和实验模态分析讨论了陶瓷构件设计的问题,并对运动系统进行了初步的高控制带宽跟踪实验。最后对这一设计、制造和装配研究过程中得到的经验进行了总结,为以后的深入研究打下了基础。

With the continuous improvement of velocity, acceleration and positioning accuracy of ultra- precision stage, there are high requirements not only on the control system but also on the moving parts＇ modes. This paper addresses such stage to raise moving components＇ modes through ceramic study. First, ceramic and aluminum alloy components mode differences are analyzed through simplified model, and it can be concluded that ceramic components can greatly increase the moving parts＇ mode. Then, the issue of designing ceramic components is discussed by theoretical mode analysis and experimental mode analysis. And a preliminary high frequency signal following experiment is conducted to test the motion system＇ s bandwidth. Finally, the author sums up the experience of design, manufacturing and assembly during this process and lay the foundation for the future in-depth study.