基于MEMS技术的柔性Ni基热敏传感器阵列研制

Development of Flexible Nickel Thermal Sensor Array

利用Ni材料的高电阻温度系数特性,结合MEMS微加工技术,研究开发了全柔性的Ni基热敏传感器及其阵列。对传感器阵列的材料选择、Ni薄膜电阻的特点以及制备工艺进行了研究。通过油浴升温和电流阶跃响应方法实现了对传感器重要静态、动态参数的测量。实验结果表明,该热敏电阻传感器在5～80℃范围内具有电阻温度系数高、热响应速度快的特点。该柔性传感器阵列可方便贴附于曲型表面,为温度、速度、剪应力等快速分布式低侵入测量提供了新型支持手段。

With MEMS fabrication technology, flexible Ni thermal sensor array was successfully fabricated. Sensing material selection, Ni-film resistor design and micro-fabrication technology of the flexible sensor array were researched. According to the methods of oil bath and current step response, static and dynamic parameters were measured. The experimental results show that thermal sensors in the range from 5 to 80 ℃ have a high TCR and fast thermal response speed. The flexible sensor array can be a new means for low-invasive distribution measurement of temperature, velocity, shear stress, especially on curved surfaces.