摘要
详细阐述了用于纳米定位的偏振激光干涉仪的原理,并介绍了基于该偏振仪的纳米定位控制方法.该方法已由实验论证,实验位移系统的最小步长实测值为5 nm.并对系统的最小位移步长、重复性和分辨率做了详细的分析,在系统环境控制条件下适用于毫米行程位移,可应用于纳米计量和纳米加工.
The principle of polarimetric interferometer used for nanopositioning was presented; and the displacement control method based on this polarimetric inerferometer was introduced. The proposed principle was set up. The practical minimal displacement step of our established system was 5 nm. The experimental results of this system including minimal step, repeatability and resolution were presented. Such a system can be used over milimeter range displacements in a controlled surrounding environement leading to numerous applications in nanometroloy and nanoprocessing.
出处
《中国计量学院学报》
2009年第2期118-121,共4页
Journal of China Jiliang University
关键词
偏振干涉仪
锁相回路
纳米定位
polarimetric interferometer
phase locked loop
nanopositioning
