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微光学陀螺仪波导环结构设计研究

The study of waveguide ring structure design of MOG
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摘要 微光学陀螺仪(MOG)研制中的最关键一项技术是制备低损耗螺线波导并用面耦合技术做成互易结构。通过理论分析提出MOG单模波导设计方案,用微偏移、外侧刻槽、波导透镜等结构设计减少弯曲损耗,并提出波导螺线环耦合方案,得到一种比较实用的低损耗波导设计,对设计MOG波导环结构进行有益的探索。 The most important technology of the MOG's fabrication is to fabricate low loss waveguide and form alternative structure using face-face coupling technology. The structure design method of MOG's singlemode waveguide will be put forward in my article by analysing in theory. Introducing an offset at the junction of two waveguides, etching groove at the outside of bend waveguide and using waveguide lens effect to decrease bend loss. The coupling method of spiral ring waveguide are put forward too. So one comparatively applied low loss waveguide structure can be devised. It's benefit to design the structure of MOG's spiral ring waveguide.
出处 《光学仪器》 2009年第3期70-75,共6页 Optical Instruments
关键词 微光学陀螺仪(MOG) 波导 耦合 micro optic gyroscopes (MOG) waveguide coupling
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