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高档金刚石工具的研究开发及应用 被引量:1

Research and development with application of high quality diamond tools
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摘要 随着我国石材加工业的高速发展,必须发展高档金刚石工具。高档金刚石砂轮和涂附磨具在玻璃、陶瓷、木材加工和汽车制造业的需求量日益增大,而在半导体单晶硅、多晶硅以及其他晶体的加工中,对其性能要求越来越高,市场的潜力巨大。文章简介石材加工用高档激光焊接圆锯片和薄壁钻头以及金刚石串珠绳锯的研制,特别介绍金刚石涂附磨具的研制和应用。此外在电子信息和光电子产业的晶体加工中,高档金刚石工具占据重要的地位,以往未受业界重视,制造难度较大,文章亦提出了见解。 With the high-speed development of stone processing industry in China, it is necessary to develop high quality diamond tools. There is a great market potential for high quality diamond tools, as glass, ceramic, wood processing and automobile manufacturing industries increase demands for high quality diamond grinding wheels and coated abrasive tools day after day, and high performance of high quality diamond tools become more required when processing single crystal silicon and polysilicon of semi-conductors or other crystals. The paper has briefly introduced how to manufacture the high quality laser welding circular saw blade, thin-walled drill bits and diamond wire saws, especially how to study, manufacture and apply diamond coated abrasive tools. Besides, high quality diamond tools are very significant to crystals processing in electronic information and optoelectronic industry, which has not been focused on by superhard material industry before. Considering the great difficulties for manufacturing high quality diamond tools, the paper has also given some suggestion.
作者 吕智 郑超
出处 《超硬材料工程》 CAS 2009年第3期39-44,共6页 Superhard Material Engineering
关键词 高档金刚石工具 激光焊接 串珠绳锯 涂附磨具 线锯 CMP high quality diamond tools laser welded diamond wire saw coated abrasive tools wire saw CMP
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