图像测量在芯片检测中的应用

Application of image measuring in chip detection

针对微电子领域芯片管脚间距离小,测量难度大等问题,利用CCD传感器的工作原理,提出了一种基于图像测量技术的芯片检测系统。根据中值滤波和均值滤波两种滤波原理,生成了一种新方法来实现图像滤波;通过对伪边界点抑制的亚像素细分算法的改进,提高了检测的速率,并采用二次标定法对系统进行标定。检测系统经过图像采集、图像处理以及测量等过程,实现了对芯片管脚间距、数目等的快速测量。

In order to solve the problems of small distance between pins of CMOS chips and difficult measurement, this paper brought up a new chips detection system based on image measurement using the measuring principles of CCD. It introduced a new denoising method under the principles of median and average denoising. The rapidity of the system had been improved by ameliorating the arithmetic of sub-pixel fractionizing and the system adopted the method of secondary demarcation. After image collection, processing and measuring, the distance between pins can be quickly gained.