微网气体探测器微结构SPACER的研制

Study of a Micromegas with Microfabricated SPACER

在多丝正比室(MWPC)受到严重挑战的形势下,微网气体探测器(micromegas)以其响应时间快、计数能力高的优势而从各种新型的气体探测器中脱颖而出。本文介绍了利用两种方法制作微网气体探测器微结构的工艺,一种是利用准LIGA工艺,以SU8胶为绝缘层;另一种是利用干膜做绝缘层来制作微网气体探测器。对比分析了SU8胶和干膜对于制作微网气体探测器的优劣。实验证明,利用干膜制作的微网气体探测器性能更好。使用放射源55Fe对其能量分辨本领进行了实验研究,结果利用干膜制作的微网气体探测器得到了有效增益,测出了逃逸峰。另外,还分析了使用编织丝网和电铸镍网对微网气体探测器的影响,实验证明,电铸镍网更适合于微网气体探测器的性能要求。

When the multi-wire proportional chamber（MWPC） is facing with great challenge,a micromegas outstands from kinds of new gas detectors for its fast response time and excellent counting capability.Two new methods of fabricating micromegas are introduced,one is a quasi LIGA process using SU8 as the insulation layer,and the other is a process using a dry film as a patternable insulation layer.Radiation resource 55Fe is used to testify the energy resolving power of the detectors,and the micromegas fabricated by dry film was found to be able to detect the escape peak.Two kinds of mircomegases with the woven wire mesh or electroformed nickel micromesh were functionally compared.The results show that the electroformed nickel micromesh is more suitable for the functional requirements of the micromegas.