纳米管、纳米线电子器件的研制

The nanodevices fabrication of nanotubes and nanowires

介绍了利用微加工方法制做单根纳米管和纳米线电子器件的过程,实现了几百纳米电极间距的器件制做,为进行单根纳米线电子器件的电子输运测量提供了可能。

This paper represents the process of fabrication of individual nanotube and nanowire electrical devices exploiting the technique of microfabrication. We realized the fabrication of nanodevices with several nanometer intervals between the electrodes, which provides the probability of performing the electron transport measurements of nanodevices of individual nanotubes and nanowires.