摘要
本文阐述了薄膜型热释电探测器原理及其薄膜的制备方法,进一步分析、整理了薄膜制备过程中的条件及参数。
This article elaborated the thin film pyroelectric detector principle and the thin film preparation method, further analyzed, reorganized in the thin film preparation process condition and the parameter.
出处
《大学物理实验》
2009年第2期27-29,共3页
Physical Experiment of College
关键词
薄膜
热释电
探测器
thin film
pyroelectric
probe
