摘要
针对真空设备研制过程中和客户实际使用过程中真空设备出现漏气现象比较普遍,无法高效快速排除真空漏气的主要问题,结合工作实践经验,采用特种气体检测法、气泡检漏法和真空计检漏法三种技术,相互交叉结合使用,在最短时间内检出设备漏点,处理设备漏气问题,及时防护设备,节约生产维护时间。该技术具有直接性、快速性和便捷性,易学易懂。
While developing and operating the vacuum equipment, the gas leakage usually appears. In order to resolve this problem, the methods of special gas test, bubble leak detection method, vacuum gauge leak detection have been adopted to resolve the gas leakage, protecting the equipment in time, saving production and maintenance time. The technologies are direct, rapid and convenient, easy to understand, need not the professional skills requirements to operate.
出处
《电子工艺技术》
2009年第4期226-229,共4页
Electronics Process Technology
基金
国家863科研攻关项目(项目编号:2006AA052407)
关键词
真空检漏仪
真空计
漏气
密封
真空室
挥发性气体
Vacuum leak detector
Vacuum gauge
Gas leakage
Sealing
Vacuum chamber
Volatile gases