基于圆度评定方法的气浮轴系回转误差分析

Analyzing rotation error of large-scale gas spindle based on roundness evaluation

大型气浮轴系相对于机械轴承具有较高的回转运动精度,主要应用于超精密测量和机械加工设备的回转主轴,以提供高精度的回转运动。大型气浮轴系回转运动精度高,但对回转误差的测量手段和方法较少,针对这一问题,采用基于圆度评定的方法对其分析,可以达到几十纳米的测量精度,满足了气浮轴系的精度要求。并且对偏心e和偏移d等参数对回转精度引起的误差进行了分析,通过数据分析发现:两种参数对气浮轴系回转精度的影响较大,偏移d对偏心e具有放大作用,所以得出:采用基于圆度评定方法的回转误差测量过程中还应该对这两项参数引入的误差进行分离,以保证对回转误差的更高精度的测量。

Compared with mechanical bearing, large-scale gas spindle has higher rotation accuracy, and it is mainly used in ultra-precision measuring and rotation principal axis of manufacturing equipment to provide a higher accuracy rotation motion. Large-scale gas spindle has a high rotation accuracy, so there are only few means to measure its rotation error. Aimed at the problem, a method based on roundness evaluation was used to analyze it. This method could reach measuring accuracy of tens of nanometers, which may satisfy the precision requirement of gas spindle. In this paper, the rotation errors caused by the parameters, such as eccentricity e and offset d, were also discussed. Through analyzing the measuring data, it shows that both of the parameters have great influence on the rotation accuracy of the gas spindle. Further more, the offset can amplify the error caused by eccentricity. In order to obtain higher measuring accuracy, the error separation of both parameters is needed in the measuring rotation accuracy of gas spindle based on roundness evaluation.