摘要
针对光互连的热门前沿问题,对目前世界上采用的波导材料进行了总结,并重点介绍了含氟聚酰亚胺和聚硅氧烷两种集成电路最适用的材料及其研究现状。为进一步开展大规模光路集成做了部分基础研究工作。
The waveguide material based on host point of optical interconneotion is summarized, and the most suitable materats, fluorinated polyimide and polyorganosilo-oxane, for integrated circuit are introduced. Some basic work for the further research of large scale integration is reviewed.
出处
《激光与光电子学进展》
CSCD
北大核心
2009年第7期36-40,共5页
Laser & Optoelectronics Progress
关键词
材料
聚合物
有机物
光波导
波导材料
materials
polymer
organic substance
optical wavegulde
waveguide material
