熔石英亚表面缺陷的研究进展

Research Progress on Subsurface Defects in Fused Silica

介绍了熔石英亚表面缺陷(SSD)的深度分布与粒径的量化关系及表面粗糙度的量化,以及杂质引起热破坏、裂纹导致电场增强、缺陷导致机械性能弱化3种诱导熔石英损伤的机理。还介绍了氢氟酸(HF)刻蚀和激光预处理2种非常有效的控制熔石英亚表面缺陷的技术,并对熔石英亚表面缺陷研究现状、存在问题和发展趋势进行了简要的总结和展望。

In this paper the quantitative analysis of the relationship between depth distribution and particle size, and surface roughness of subsurface defects （SSD） in fused silica are reviewed. Three kinds of defect-induced damage mechanisms are summarized： Impurity-induced thermal damage, crack-induced electric field enhancement and defectinduced mechanical strength weakening. As two kinds of efficient techniques to control SSD in fused silica, HF etching and laser conditioning are also introduced. In addition, the research status, problems and development trend of subsurface defects in fusion silica are concluded.