耐高压电涡流式位移传感器的设计和优化

The Design and Optimization of the Pressure-ProtectedEddy Current Distance Sensor

电涡流传感器是一种非接触式高分辨率位移传感器。本文介绍的耐高压电涡流式位移传感器可以作为阀芯位置测量元件应用于液压系统中的电液比例阀和电液伺服阀，也可以作为基本的位置测量元件应用于其他的测量与控制机构中。它的主要特点是频率响应高，温度特性好，体积小，结构简单，可靠性好，成本低。文中主要介绍了传感器的原理、结构及优化设计方法。

This paper presents the design and the optimization of the eddy current sensor which could be used in servo valve, proportional valve as a spool position sensor, or in other measure and control devices as a kind of preliminary distance sensor. Its main advantages are pressure-protected, simple, small and cheap , it has high frequency response and accurate result. Without any moveable component, it is very realiable. The principle, the structure design and the optimization of this sensor are discussed in this paper.