摘要
制作了一种新型的基于纳米晶PZT／石英的压电生物质量传感器。采用了溶胶-凝胶法在石英晶体表面制备了纳米晶PZT薄膜，形成PZrr／石英结构的敏感单元。研究了纳米晶PZT在石英基体上的微观结构、表面形貌；探讨了纳米晶PZT／石英作为敏感单元在细胞检测中的作用。实验结果表明：PZT薄膜的晶粒大小为20-30nm，沿〈101）晶向择优生长，并且，薄膜表面平整，结构致密。纳米晶PZT／石英结构的敏感单元使生物细胞传感器的灵敏度得到了提高。
A new piezoelectric microbalance biosensor based on nano-crystalline PZT/quarts is fabricated. Sol-gel method is utilized to bond the PZT thin films on the quartz substrate as the sensing unit. The microstructure and the surface appearance of PZT thin films on quartz substrate and the influence of cancer ceils detecting with the sensing unit using PZT/quartz are studied. The XRD and AFM results show that the PZT films feature （101） preferred orientation, good automorphic crystal structure,smooth surface,and the crystal particle size is 20-30 nm. The sensitivity of biosensor based on nano-crystalline PZT/quartz structure is improved.
出处
《传感器与微系统》
CSCD
北大核心
2009年第7期9-11,共3页
Transducer and Microsystem Technologies
基金
上海市纳米技术专项基金资助项目(0752nm027)
