摘要
本文根据金属有机物化学气相沉积（ＭＯＣＶＤ）系统的原理和特点，建立了计算机自动控制的热壁低压ＭＯＣＶＤ系统。我们首次采用热壁低压ＭＯＣＶＤ方法在制备高质量薄膜的同时，制备出了纳米微粉。
According to the principles and characteristics of Metal Organic chemical vapor Deposition (MOCVD) a computer controlled hot wall low pressure MOCVD system was established.High quality thin films and nanosized powders were prepared simultaneously.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1998年第1期45-49,66,共6页
Chinese Journal of Scientific Instrument
基金
博士基金
