LSI 薄膜台阶测量仪的研制

Development of the LSI Thin film Step Height Measuring Instrument

本文介绍了一台实用化的用于ＬＳＩ薄膜台阶在线检测的台阶测量仪，它采用精密机械——ＬＶＤＴ——信号处理——计算机控制的方案。使用方便，实现了台阶的自动测量。实验表明：仪器重复测量精度可达±０．０１４７μｍ，很好地满足了ＬＳＩ生产线上的要求。

This paper introduces a practical step height measuring instrument used in LSI thin film step on line test.The instrument adopts a scheme of precision mechanical system linear variable differential transformer signal processing computer control.It is easy to operate and the measurement is automatic.The results show that repeatability of the instrument is up to ±00147μm,meeting the demand in LSI production finely.