MEMS惯性仪表技术发展趋势

Development of MEMS Inertial Instrument Technology

近几十年来,随着微电子技术的发展和微机械加工设备的完善和精度的提高,以单晶硅、石英晶体等材料研制的各种微型惯性仪表及其系统产品相继问世,它与传统的机械式惯性仪表相比,体积大为缩小,质量大为减轻,功耗大幅度降低;采用微机械工艺,可以实现大批量生产,故价格低廉;如果采用与IC兼容的工艺方式,配套电路还可以和微敏感结构集成一体化,MEMS惯性仪表具有可靠性高、承载能力强和测量范围大的特点;这些是传统机械式惯性器件无法比拟的。重点概述了近年来国内外微机电加速度计、微机电陀螺仪及其系统应用技术的发展情况,探讨了MEMS惯性技术下一步发展趋势。

During these decades, with the development of technology in micro-electronics field as well as the promotion of the micro-machine devices in performance and precision, the utilization of micro inertial instruments and their system products have been emerged. Compared with conventional machine inertial instruments, they have the advantages of small volume, extremely reduced mass and power waste. With the utilization of the micro-machining technics, these micro inertial instruments are able to be put into batch production, so their price is inexpensive. If their fabricating process is compatible with the integrated circuit, their servo electronics can be also packaged with the micro sensory chips. Micro electromechanism system （MEMS） inertial instruments have the characteristics of high reliability, great load bearing, large measurement range, which are unsurpassable by the conventional machine inertial instruments. The development status of MEMS accelerometer and MEMS gyro are summarized, as well as the application technology of these systems at home and abroad. The farther directions of MEMS inertial technology development are also discussed.