高陡度非球面光学元件加工技术研究

Study of the fabrication of deep aspheric optic surface

高陡度非球面光学元件因形状特点,其毛坯成形、研磨和抛光等加工技术难度远高于传统的球面元件。其加工过程中根据不同材料和不同加工阶段分别应用化学气相沉积(CVD)精密复制方法、单点金刚石车削(DPT)、金刚石磨削、确定性微研磨(DMG)、磁流变抛光(MRF)和射流抛光等先进制造技术。分析高陡度非球面光学元件的形状特征,重点讨论高陡度非球面光学元件的加工技术及关键工艺,针对凹面抛光加工等技术难点做出工艺分析。

Several kinds of advanced manufacturing technology including chemical vapor deposition, single point diamond turning, diamond grinding, deterministic micro-grind, magnetorheological finishing and fluid jet polishing method are applied to the deep aspheric optic surface manufacturing. Studied the surface characters and made a comprehensive analysis of the fabrication process. The key points and parameters of the manufacturing process including the concave surface polishing were discussed.